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EMS 4000

EMS 4000 ControllerResist Spinner Unit

The EMS Spin Coater Model 4000 provides a simple and economical means of applying highly accurate coatings to silicon wafers, ceramic substances or other flat items at upto 10,000rpm.  The Model 4000 consists of a bench top spinner and a remote microprocessor control unit, linked by a flexible cable.

Features:

  • Ability to repeat a job many times with great accuracy to produce reliable coatings
  • Single 'press to go' button control
  • Simple programming of spin speeds, times and accellerations
  • Storage of 59 job settings to reduce set up times
  • Wide selection of 'quick fit' chucks for any sized substrate
  • Fast and easy cleaning to ensure long and reliable production life
  • Additional outputs for controlling resist pumps, developer systems and infrared systems.

Applications:

  • Application of Photo Resist
  • Application of Epoxy
  • Any work requiring a precise timed sequences of speeds

Requirements:

  • Power 110V or 240V at 2 amps
  • Vacuum >> 15"
  • Dimensions: 250 x 250 x100mm

Click here for the Data Sheet (738KB).      Click here for the User Manual (398KB).

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Electronic Micro Systems Ltd.
Last Updated: 05-Dec-2007