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EMS 5000-1

Microprocessor Control Unit Model 5000-1Bench Top Spinner

Electronic Micro Systems Ltd have launched the EMS Spin Coater Model 5000-1.  This new generation photo resist spinner brings full closed loop motor control and the ability to be programmed using certain Epoc based Personal Organisers or (soon) a PC.  This allows users to share programme sequences with multiple machines and makes the backing up and organising of data file much more convenient.  Programmes can even be sent as attachments by e-mail to other plants or depots.

Like it's predecessor, the EMS 5000-1 provides the same simple and economical means of applying highly accurate coatings to silicon wafers, ceramic substances or other flat items at up to 9,500rpm.  The Model 5000-1 consists of a bench top spinner and a remote microprocessor control unit, linked by a flexible cable.

Features:

  • Ability to repeat a job many times with great accuracy to produce reliable coatings
  • Single 'press to go' button control
  • Simple programming of spin speeds, times and accelerations
  • A variety of bench top spinners available
  • Wide selection of 'quick fit' chucks for any sized substrate
  • Fast and easy cleaning to ensure long and reliable production life
  • Additional outputs for controlling resist pumps, developer systems and infrared systems.
  • Programmes are downloaded via a serial connection from a personal organiser or PC

Applications:

  • Application of Photo Resist
  • Application of Epoxy
  • Any work requiring a precise timed sequences of speeds

Requirements:

  • Power 110V or 240V at 2 amps
  • Vacuum >> 15"
  • Dimensions: 325 x 260 x 112mm

Click here for the Data Sheet (1546KB).      Click here for the User Manual (928KB).

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Click here to download the latest Psion programming application.

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Electronic Micro Systems Ltd.
Last Updated: 13-Feb-2009